File:LELELE patterning.png

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LELELE_patterning.png ‎(331 × 436 pixels, file size: 5 KB, MIME type: image/png)

Summary

Description
English: LELELE patterning consists of 3 instances of litho-etch (LE) to enable 3x the number of features within a single resolvable distance. For example, linewidths of 17-22 nm may be relevant here.
Date
Source
Microsoft Office Excel (2018–present) 
This diagram was created with Microsoft Excel.
Author Guiding light

Licensing

Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Original upload log

The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2019-04-12 18:04:48 331 × 436 Guiding light
2018-07-22 07:44:04 343 × 523 Guiding light
2018-07-22 07:42:25 373 × 523 Guiding light
2018-07-22 03:21:43 343 × 523 Guiding light
2018-07-21 13:39:54 343 × 523 Guiding light
2018-07-21 08:41:24 343 × 523 Guiding light
2018-07-21 06:05:32 343 × 523 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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21 July 2018

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Date/TimeThumbnailDimensionsUserComment
current21:26, 20 August 2019Thumbnail for version as of 21:26, 20 August 2019331 × 436 (5 KB)OgreBot(BOT): Reverting to most recent version before archival
21:26, 20 August 2019Thumbnail for version as of 21:26, 20 August 2019343 × 523 (8 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-07-22 07:44:04 by Guiding light
21:26, 20 August 2019Thumbnail for version as of 21:26, 20 August 2019373 × 523 (8 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-07-22 07:42:25 by Guiding light
21:26, 20 August 2019Thumbnail for version as of 21:26, 20 August 2019343 × 523 (8 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-07-22 03:21:43 by Guiding light
21:26, 20 August 2019Thumbnail for version as of 21:26, 20 August 2019343 × 523 (8 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-07-21 13:39:54 by Guiding light
21:26, 20 August 2019Thumbnail for version as of 21:26, 20 August 2019343 × 523 (8 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-07-21 08:41:24 by Guiding light
21:26, 20 August 2019Thumbnail for version as of 21:26, 20 August 2019343 × 523 (8 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-07-21 06:05:32 by Guiding light
16:30, 20 August 2019Thumbnail for version as of 16:30, 20 August 2019331 × 436 (5 KB)Dave louis johnTransferred from en.wikipedia (MTC!) (1.1.0)
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