File:Wafer flats convention v2.svg

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Summary

Description

Wafer flats convention, based on Image:Wafer flats convention.PNG

Conventional meaning of flats in semiconductor wafers. Red denotes material that has been removed.

Wafer orientation is the orientation of the crystallographic plane in which the crystal grew. Wafer type indicated the type of doping.
Primary flat - indicates crystallographic planes of high symmetry (usually the {110} face).
Secondary flat - it's position relative to Primary flat or it's absence is indicating the doping type and the orientation of wafer.

  • Absence - p {111}
  • 90° - p {100}
  • 180° - n {100}
  • 45° - n {111}
Wafers under 200mm generally have flats indicating crystallographic planes of high symmetry (usually the {110} face) and, in old-fashined wafers (those below about 100mm diameter), the wafer's orientation and doping type. Modern wafers use a notch to convey this information, in order to waste less material. Orientation is important for wafer cleavage, and can affect other structural and electronic properties as well.
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self-made,

 
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Author Twisp
Other versions Wafer flats convention.PNG

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inception

29 February 2008

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Date/TimeThumbnailDimensionsUserComment
current21:40, 24 September 2013Thumbnail for version as of 21:40, 24 September 2013150 × 150 (13 KB)Cepheidenfixed position of secondary flat Silicon processing for the VLSI era - Vol. 1 - Process technology; S Wolf; RN Tauber - Lattice Press; 1986; ISBN 096167237; p. 23
00:37, 23 December 2008Thumbnail for version as of 00:37, 23 December 2008150 × 150 (13 KB)InductiveloadAdded arrow indication <110> direction and enlarged flats so they can be easily seen
21:17, 29 February 2008Thumbnail for version as of 21:17, 29 February 2008150 × 150 (9 KB)Twisp
21:13, 29 February 2008Thumbnail for version as of 21:13, 29 February 2008150 × 150 (9 KB)Twisp
21:06, 29 February 2008Thumbnail for version as of 21:06, 29 February 2008150 × 150 (8 KB)Twisp
20:59, 29 February 2008Thumbnail for version as of 20:59, 29 February 2008150 × 150 (8 KB)Twisp
18:09, 29 February 2008Thumbnail for version as of 18:09, 29 February 2008150 × 150 (9 KB)Twisp{{Information |Description= Wafer flats convention, based on Image:Wafer flats convention.PNG Conventional meaning of ''flats'' in semiconductor wafers. Black denotes material that has been removed. Wafer orientation is
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