File:HPCVD chamber.JPG

Summary[edit]

The reactor chamber of laboratory-scale Hybrid Physical-Chemical Vapor Deposition (HPCVD) system in the Pennsylvania State University, US. The stainless steel susceptor sits on a quartz rod inside the water-cooled chamber. During deposition, it will be heated up by the inductive heating coil (copper tubing outside the chamber). The Silicon carbide (SiC) substrate and magnesium pellets are on the top of the susceptor

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